Main activities
- Developing gas detection sensors
- Investigating electrochemical sensors and biosensors
- Engineering micro- and nanosystems to be applied in sensors (MEMS, NEMS) and electronics
Laboratory equipment
- Time-of-flight mass spectrometers
- Setup to perform tip bonding of chips and thin-layer samples, with semiconductor and impedance analyzers allowing electrical characterization
- Tescan Mira II scanning electron microscope to observe biological samples: EDX/WDX detectors integrated, UHV/NHV modes fully usable, and a low vacuum secondary Tescan detector (LVSTD) at hand for expanded operability
- Ion beam assisted deposition system to deliver very thin conforming films
- Instruments to deposit self-assembled monolayers and Parylene => forming hydrophobic sheets in spin-coating and microfluidic applications, and generating biocompatible films for lab-on-a-chip devices.
Responsible person
