Microfluidic device based on deep reactive ion etching process and its lag effect for single cell capture and extraction

We introduced a microfluidic device for high-efficiency single cell capture and their subsequent extraction. It was fabricated by using a deep reactive ion etching process taking advantage of the lag effect. We accomplished single cell capture based on the least flow resistance path principle as well as independent extraction of individual captured cells to perform their subsequent analysis. The device was performed with >99% single cell capture efficiency.