Optimization of Deposition Parameters of a DLC Layer Using (RF) PECVD Technology

The aim of this study was to carry out a planned experiment (DoE) in order to find a suitable combination of deposition parameters to increase the hardness of the coating. In a 20-round experiment, parameters of chamber pressure, gas flow and the power of an RF source were gradually changed. Subsequently, a micro hardness analysis was carried out using the Berkovich method. Using the DoE method, a combination of parameters was detected within which a comparable hardness of the coating was achieved as with doping of the hydrogen atoms coating to increase the number of Sp3 carbon bonds. Within the indentation test, a scratch test was carried out to determine the normal force required to break the coating.