Predictive Modeling of MEMS via Generic Meminductors: The Multiport Inductor Approach

It is shown for the first time that a large class of generic meminductors with a specific form of the state equation can be constructed from elements of Chua's periodical table and a multiport inductor. The electrical port of this inductor is identical to the physical port of the meminductor. The other ports, which may be of general, i.e. not electrical nature, interconnect the processes that make up the overall dynamics of the element. This result allows creating predictive models of a wide range of existing MEMS (Micro-Electro-Mechanical Systems) exhibiting the behavior of generic meminductors. A model building procedure is described using the example of an elastic meminductive system. The model is then implemented in SPICE and verified by computer simulations.